5850EM Series

產品參數

1. Flow Range (Full Scale Capacity): 0.06 sccm - 30,000 sccm
3. Seal Material: Metal Seal
3. Accuracy: 1% F.S. incl. linearity , 1.5% F.S. incl. linearity >20 slpm
4. Repeatability: 0.15% FS