GF 100 Series

Product Parameter

1. Flow Range (Full Scale Capacity): Standard GF Series: 3 sccm - 55 slm , High Flow GF Series: 55 slm - 300 slm
2. Seal Material: Metal Seal
3. Accuracy: ±1% S.P. > 35-100% , ±0.35% F.S. 2-35%
4. Repeatability: < ±0.15% SP